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The Industrial Technology Research Institute, or ITRI is showcasing three cutting-edge technologies at the “Touch Taiwan” trade show, currently held at the Nangang Exhibition Center in Taipei. The new technologies promise to improve yield and reduce costs by as much as 30%. Let’s take a look.
The latest in display manufacturing is to upgrade panel-level packaging processes by developing advanced through glass via, or TGV substrates. A successful breakthrough was made by ITRI, with an all-solution processed next-generation metallization technology. This solves the problem of discontinuities in packaging substrates, and reduces costs by as much as 30%.
Huang Meng-chi
ITRI Mechanical and Mechatronics Systems Lab
Our current generation which we’re showcasing now is glass. But our team is actually starting to develop versions with silicon carbide or similar materials. These are more effective at dissipating heat than glass. Actually, our current technology can be applied to silicon carbides. In the entire semiconductor manufacturing process, plasma is probably utilized in 30% of the total or above.
In addition to improving packaging processes, ITRI is also presenting a wafer-based plasma sensing system that improves yield. In it, 19 micro sensors monitor the process in real-time, increasing measurement efficiency by 10 times. There’s also a low vapor pressure precursor vaporization and delivery system, which improves wafer coating evenness, increasing yield by 2 to 3% and saving maintenance fees of depositing machines, which would’ve cost millions otherwise.
Huang Meng-chi
ITRI Mechanical and Mechatronics Systems Lab
We know that traditionally, many of the materials and equipment used in chip manufacturing are imported from abroad. We’ve connected domestic giants in equipment and materials, so that our supply chain can be entirely localized. That significantly reduced some of the costs in end manufacturing processes.
With support from the Ministry of Economic Affairs, ITRI is joining hands with the industry to promote advancements in display-level semiconductor manufacturing, and consolidate Taiwan’s position in global AI supply chains.
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